Applications for this low- pressure transmitter include bio-tech, bio-pharm, HVAC, room pressurization and control, and environmental and pollution control. The unit has a variable capacitance sensor within a glass-clad silicon chip. The patented sensor technology combines the inherent high sensitivity of a variable capacitance transducer with the repeatability of a micro-machined, ultra-thin silicon diaphragm. The transmitter's sensor enables precise measurement and control of very low pressure. The ultra-thin diaphragm deflects only a micron yet is many more times sensitive than silicon piezo-resistive pressure sensors. There are no epoxies or other organics in the sensor to contribute to drift or mechanical degradation over time. The glass-clad silicon diaphragm withstands extreme overpressure as well as severe shock and vibration.
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